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HomeMaterials Science ForumMaterials Science Forum Vols. 185-188Role of Electron / Hole Processes in the Initial...

Role of Electron / Hole Processes in the Initial Stage of Silicon Anodization

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Passivation of Metals and Semiconductors

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Periodical:

Materials Science Forum (Volumes 185-188)

Pages:

115-118

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.185-188.115

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Online since:

March 1995

Authors:

V.X. Uritsky

Keywords:

Anodization, Avalanche, Current Efficiency, Electrically Active Centers, Hole Traps Density, Ionic Current, Kinetics of Oxidation, MOS Structure, Si-SiO₂ Interface

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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