Passivation and Depassivation of Electrically Active Centers in the Polysilicon-Oxide-Silicon Structures

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Periodical:

Materials Science Forum (Volumes 185-188)

Edited by:

K.E. Heusler

Pages:

109-114

DOI:

10.4028/www.scientific.net/MSF.185-188.109

Citation:

I.A. Uritskaya and V.Y. Uritsky, "Passivation and Depassivation of Electrically Active Centers in the Polysilicon-Oxide-Silicon Structures", Materials Science Forum, Vols. 185-188, pp. 109-114, 1995

Online since:

March 1995

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$35.00

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