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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Sputter-Etching as a Surface Preparation Technique...

Sputter-Etching as a Surface Preparation Technique for Schottky Contacts

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

821-824

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.821

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Online since:

February 1998

Authors:

Shin Ichi Kinouchi, Hiroshi Sugimoto, Yoichiro Tarui, Kenichi Ohtsuka, Tetsuya Takami, Tatsuo Ozeki

Keywords:

6H-SiC, n-Value, Schottky Contact, Sputter-Etching

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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