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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Etching Kinetics of α-SiC Single Crystals by...

Etching Kinetics of α-SiC Single Crystals by Molten KOH

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

837-840

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.837

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Online since:

February 1998

Authors:

Masakazu Katsuno, Noboru Ohtani, J. Takahashi, Hirokatsu Yashiro, M. Kanaya, S. Shinoyama

Keywords:

Etching Kinetics, Molten KOH, Oxidation, Polytype, Surface Polarity

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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