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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Effects of the Cooling-Off Condition on the...

Effects of the Cooling-Off Condition on the Oxidation Process in 6H-SiC

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

845-848

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.845

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Online since:

February 1998

Authors:

Katsunori Ueno

Keywords:

6H-SiC, Bias Temperature Treatment, C-V Characteristics, Metal-Oxide-Semiconductor Field Effect Transistor (MOSFET), Mobility, Oxidation, Stability, Surface, Surface States

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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