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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Structural Investigation on the Nature of Surface...

Structural Investigation on the Nature of Surface Defects Present in Silicon Carbide Wafers Containing Varying Amount of Micropipes

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

453-456

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.453

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Online since:

May 2000

Authors:

M. Shamsuzzoha, Stephen E. Saddow, T.E. Schattner, Li Jin, Michael Dudley, S.V. Rendakova, Vladimir Dmitriev

Keywords:

Micropipe, Screw Dislocations, SWBXT, TEM

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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