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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393A Comparative Study of the Electrical Properties...

A Comparative Study of the Electrical Properties of 4H-SiC Epilayers with Continuous and Dissociated Micropipes

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

1137-1140

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.1137

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Online since:

April 2002

Authors:

Isaho Kamata, Hidekazu Tsuchida, Tamotsu Jikimoto, Kunikaza Izumi

Keywords:

4H-SiC, Breakdown Voltage, I-V Characteristic, Micropipe, Micropipe Dissociation

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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