Fabrication and Characterization of 4H-SiC Planar MESFET Using Ion- Implantation

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

1181-1184

DOI:

10.4028/www.scientific.net/MSF.457-460.1181

Citation:

H. J. Na et al., "Fabrication and Characterization of 4H-SiC Planar MESFET Using Ion- Implantation ", Materials Science Forum, Vols. 457-460, pp. 1181-1184, 2004

Online since:

June 2004

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$35.00

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