Initial Oxidation of 6H-SiC (0001) (3 x 3)-R30° and 3 x 3 Surfaces Studied by AES and RHEED

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

1313-1316

DOI:

10.4028/www.scientific.net/MSF.457-460.1313

Citation:

T. Aoyama et al., "Initial Oxidation of 6H-SiC (0001) (3 x 3)-R30° and 3 x 3 Surfaces Studied by AES and RHEED", Materials Science Forum, Vols. 457-460, pp. 1313-1316, 2004

Online since:

June 2004

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