Advanced Processing Techniques for Silicon Carbide MEMS and NEMS

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

1451-1456

Citation:

C. A. Zorman and M. Mehregany, "Advanced Processing Techniques for Silicon Carbide MEMS and NEMS", Materials Science Forum, Vols. 457-460, pp. 1451-1456, 2004

Online since:

June 2004

Export:

Price:

$38.00

[1] C.A. Zorman, S. Roy, C.H. Wu, A.J. Fleischman and M. Mehregany: J. Mat. Res. Vol. 13, (1998), p.406.

[2] P.M. Sarro: Sens. Actuators Vol. 82 (2000), p.210.

[3] C.R. Stoldt, C. Carraro, W.R. Ashurst, D. Gao, R.T. Howe and R. Maboudian: Sens. Actuators A, Vol. 97-98, (2002), p.410.

[4] C.A. Zorman, S. Rajgopal, X.A. fu, R. Jezeski, J. Melzak and M. Mehregany: Electrochem. Sol. State Lett. Vol. 5, (2002), p. G99.

[5] S. Roy. Ph.D. Dissertation, Case Western Reserve University, May (2001).

[6] M. Mehregany, C.A. Zorman, S. Roy, A.J. Fleischman, C.H. Wu and N. Rajan: Inter. Mat. Rev. Vol. 45 (2000) p.85.

[7] S. Roy, R.G. DeAnna, C.A. Zorman and M. Mehregany: IEEE Trans on Electron Dev. Vol. 49 (2002), p.2323.

[8] R.F. Wiser, C.A. Zorman and M. Mehregany, in Proc. 12th Internat. Conf. on Solid State Sensors and Actuators, Boston MA, 2003, p.1164.

[9] A.A. Yasseen, C.H. Wu, C.A. Zorman and M. Mehregany: Elec. Dev. Lett. Vol. 21 (2000), p.164.

[10] X. Song, S. Rajgolpal, J.M. Melzak, C.A. Zorman and M. Mehregany: Mat. Sci. Forum Vol. 389-393 (2002), p.755.

[11] C.A. Zorman, A.J. Fleischman, A.S. Dewa, M. Mehregany, C. Jacob, S. Nishino and P. Pirouz: J. Appl. Phys Vol. 78 (1995), p.5136.

[12] X.H.M. Huang, K.L. Ekinci, Y.T. Yang, C.A. Zorman, M. Mehregany and M.L. Roukes, in Technical Digest 2002 Solid State Sensor, Actuator and Microsystems Workshop, Hilton Head SC, p.368.

[13] X.M.H. Huang, C.A. Zorman, M. Mehregany, and M.L. Roukes, Nature Vol 421 (2003), p.496.

[14] X.H.M. Huang, C.A. Zorman, M. Mehregany and M.L. Roukes: in Proc. 12th Internat. Conf. on Solid State Sensors and Actuators, Boston MA, 2003, p.722.

[15] X.H.M. Huang, M.K. Prakash, C.A. Zorman, M. Mehregany and M.L. Roukes: in Proc. 12th Internat. Conf. on Solid State Sensors and Actuators, Boston MA, 2003, p.342.