Advanced Processing Techniques for Silicon Carbide MEMS and NEMS

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

1451-1456

DOI:

10.4028/www.scientific.net/MSF.457-460.1451

Citation:

C. A. Zorman and M. Mehregany, "Advanced Processing Techniques for Silicon Carbide MEMS and NEMS", Materials Science Forum, Vols. 457-460, pp. 1451-1456, 2004

Online since:

June 2004

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Price:

$35.00

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