AlGaN / GaN HEMT Structures Grown on SiCOI Wafers Obtained by the Smart CutTM Technology

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Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

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1621-1624

Citation:

H. Larhèche et al., "AlGaN / GaN HEMT Structures Grown on SiCOI Wafers Obtained by the Smart CutTM Technology ", Materials Science Forum, Vols. 457-460, pp. 1621-1624, 2004

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June 2004

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DOI: https://doi.org/10.1002/1521-396x(200112)188:2<501::aid-pssa501>3.3.co;2-y

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