Step Free Surface Heteroepitaxy of 3C-SiC Layers on Patterned 4H/6H-SiC Mesas and Cantilevers

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

169-174

DOI:

10.4028/www.scientific.net/MSF.457-460.169

Citation:

P. G. Neudeck et al., "Step Free Surface Heteroepitaxy of 3C-SiC Layers on Patterned 4H/6H-SiC Mesas and Cantilevers", Materials Science Forum, Vols. 457-460, pp. 169-174, 2004

Online since:

June 2004

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$35.00

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