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HomeMaterials Science ForumMaterials Science Forum Vols. 457-460Flash Lamp Supported Deposition of 3C-SiC (FLASiC)...

Flash Lamp Supported Deposition of 3C-SiC (FLASiC) – a Promising Technique to Produce High Quality Cubic SiC Layers

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Silicon Carbide and Related Materials 2003

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Periodical:

Materials Science Forum (Volumes 457-460)

Pages:

175-180

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.457-460.175

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Cite this paper

Online since:

June 2004

Authors:

Wolfgang Skorupa, D. Panknin, W. Anwand, M. Voelskow, Gabriel Ferro, Yves Monteil, André Leycuras, Joerg Pezoldt, R.A. McMahon, M. Smith, Jean Camassel, J. Stoemenos, Efstathios K. Polychroniadis, Philippe Godignon, Narcis Mestres, Daniel Turover, S. Rushworth, A. Friedberger

Keywords:

3C-SiC, Flash Lamp Annealing, Microstructure, Modeling, Nanoscale Epitaxy

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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[1] D. Panknin, J. Stoemenos, M. Eickhoff, V. Heera, N. Vouroutzis, G. Krötz and W. Skorupa: Mat. Sci. Forum, Vol. 353-356 (2001) p.151.

DOI: 10.4028/www.scientific.net/msf.353-356.151

[2] Patents pending for the FLASiC and i-FLASiC processes.

[3] H. Wirth, D. Panknin, W. Skorupa, and E. Niemann: Appl. Phys. Lett. Vol. 74 (1999), P. 979.

[4] The reader is referred to the articles of Ferro et al., Polychroniadis et al., and Smith et al. to get a complete picture of the present state of the art of FLASiC.

[5] T. Chassagne, G. Ferro, D. Chaussende, F. Cauwet, Y. Monteil and J. Bouix: Thin Solid Films Vol. 402 (2002), p.83.

DOI: 10.1016/s0040-6090(01)01597-8

[6] M. Voelskow et al., to be published. Fig. 5 Dependence of the melting depth of silicon in FLASiC structures on the pulse energy density.