As-Grown and Process-Related Defects in Schottky Barrier Diodes Fabricated on Bulk Off-Axis n-Type 6H-SiC

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

697-700

DOI:

10.4028/www.scientific.net/MSF.457-460.697

Citation:

E. van Wyk and A.W.R. Leitch, "As-Grown and Process-Related Defects in Schottky Barrier Diodes Fabricated on Bulk Off-Axis n-Type 6H-SiC", Materials Science Forum, Vols. 457-460, pp. 697-700, 2004

Online since:

June 2004

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