In-Diffusion, Trapping and Out-Diffusion of Deuterium in 4H-SiC Substrates

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Periodical:

Materials Science Forum (Volumes 527-529)

Edited by:

Robert P. Devaty, David J. Larkin and Stephen E. Saddow

Pages:

637-640

DOI:

10.4028/www.scientific.net/MSF.527-529.637

Citation:

M. K. Linnarsson et al., "In-Diffusion, Trapping and Out-Diffusion of Deuterium in 4H-SiC Substrates", Materials Science Forum, Vols. 527-529, pp. 637-640, 2006

Online since:

October 2006

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