Hydrogen Gas Sensors Fabricated on Atomically Flat 4H-SiC Webbed Cantilevers

Abstract:

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This paper reports on initial results from the first device tested of a “second generation” Pt-SiC Schottky diode hydrogen gas sensor that: 1) resides on the top of atomically flat 4H-SiC webbed cantilevers, 2) has integrated heater resistor, and 3) is bonded and packaged. With proper selection of heater resistor and sensor diode biases, rapid detection of H2 down to concentrations of 20 ppm was achieved. A stable sensor current gain of 125 ± 11 standard deviation was demonstrated during 250 hours of cyclic test exposures to 0.5% H2 and N2/air.

Info:

Periodical:

Materials Science Forum (Volumes 600-603)

Edited by:

Akira Suzuki, Hajime Okumura, Tsunenobu Kimoto, Takashi Fuyuki, Kenji Fukuda and Shin-ichi Nishizawa

Pages:

1199-1202

DOI:

10.4028/www.scientific.net/MSF.600-603.1199

Citation:

P. G. Neudeck et al., "Hydrogen Gas Sensors Fabricated on Atomically Flat 4H-SiC Webbed Cantilevers ", Materials Science Forum, Vols. 600-603, pp. 1199-1202, 2009

Online since:

September 2008

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$35.00

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