Lifetime Investigations of 4H-SiC PiN Power Diodes

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Abstract:

Lifetime measurements are performed on 4H-SiC pin power diodes (6.5 kV). The lifetime values in the base range from 1.1 s to 2.1 s; these values demonstrate the high quality of the 4H-SiC epilayer and the optimized device processing. The observed lifetimes are correlated with deep defect centers detected by deep level transient spectroscopy. The role of the Z1/2-center as a lifetime killer is discussed.

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Materials Science Forum (Volumes 615-617)

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699-702

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March 2009

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© 2009 Trans Tech Publications Ltd. All Rights Reserved

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