Effects of the Surface Condition of the Substrates on the Electrical Characteristics of 4H-SiC MOSFETs

Abstract:

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Metal Oxide Semiconductor Field Effect Transistors (MOSFETs) were fabricated on p-type epitaxial 4H-SiC substrates with different surface conditions and these electrical characteristics were compared. The MOSFETs on Chemical Mechanical Polished substrates showed the drain current of the order of 10-12A at a gate voltage of 0 V, and the value of the drain current increased with increasing the surface roughness of substrates. With decreasing the surface roughness of substrates, the values of the threshold voltage decreased and the quality of gate oxide became better.

Info:

Periodical:

Materials Science Forum (Volumes 615-617)

Edited by:

Amador Pérez-Tomás, Philippe Godignon, Miquel Vellvehí and Pierre Brosselard

Pages:

781-784

DOI:

10.4028/www.scientific.net/MSF.615-617.781

Citation:

T. Ohshima et al., "Effects of the Surface Condition of the Substrates on the Electrical Characteristics of 4H-SiC MOSFETs", Materials Science Forum, Vols. 615-617, pp. 781-784, 2009

Online since:

March 2009

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Price:

$35.00

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