The Formation of Alphabet Lines in 4H SiC after Low-Energy Electron Irradiation

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Abstract:

Low voltage electron irradiations with electron energies down to the C-displacement threshold have been performed and the irradiated samples studied subsequently by low temperature photoluminescence microscopy. The results were found to depend on the electron energy, the n(N)- or p(Al)-doping and the C- or Si-face irradiated. The implications of these results for the current understanding of the atomic origins of these lines are discussed.

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Materials Science Forum (Volumes 645-648)

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407-410

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April 2010

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© 2010 Trans Tech Publications Ltd. All Rights Reserved

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