Influence of Processing and of Material Defects on the Electrical Characteristics of SiC-SBDs and SiC-MOSFETs

Abstract:

Article Preview

The influences of processing and material defects on the electrical characteristics of large-capacity (approximately 100A) SiC-SBDs and SiC-MOSFETs have been investigated. In the case of processing defects, controlled activation annealing is the most important factor. On the other hand for material defects, the number of epitaxial defects must be decreased to zero for both SBDs and MOSFETs. The dislocation defects in SiC wafers are dangerous for the breakdown voltage of MOSFETs. However, they are not killer defects. If the epitaxial defect density is sufficiently low and the dislocation density is in the order of 10000cm-2, the long- term reliability of the gate oxide at the electric field of 3MV/cm can be guaranteed.

Info:

Periodical:

Materials Science Forum (Volumes 645-648)

Edited by:

Anton J. Bauer, Peter Friedrichs, Michael Krieger, Gerhard Pensl, Roland Rupp and Thomas Seyller

Pages:

655-660

DOI:

10.4028/www.scientific.net/MSF.645-648.655

Citation:

K. Fukuda et al., "Influence of Processing and of Material Defects on the Electrical Characteristics of SiC-SBDs and SiC-MOSFETs", Materials Science Forum, Vols. 645-648, pp. 655-660, 2010

Online since:

April 2010

Export:

Price:

$38.00

[1] H. Saitoh, T. Kimoto and H. Matsunami, Mat. Sci. Forum, Vols. 457-460 (2004), p.997.

[2] Q. Wahab et al., Appl. Phys. Lett. Vol. 76 (2000), p.2725.

[3] H. Yamaguchi, H. Matsuhata and I. Nagai , Mat. Sci. Forum, Vols. 600-603 (2009), p.313.

[4] A. Kinoshita et al., proceedings of ICSCRM2009.

[5] A. Kinoshita et al., Mat. Sci. Forum, Vols. 615-617 (2009), p.643.

[6] R. Kosugi et al., Mat. Sci. Forum, Vols. 615-617 (2009), p.683.

[7] J. Senzaki et al. in report of NEDO project Development of Inverter Systems for Power Electronics, (2009) (in Japanese).

[8] J. Senzaki et al., Jpn. J. Appl. Phys. Vol. 48 (2009), p.081404.

In order to see related information, you need to Login.