Diffusion of Alkali Metals in SiC

Margareta K. Linnarsson; Anders Hallén

doi:10.4028/www.scientific.net/MSF.778-780.297

Paper Titles

Oxidation Induced ON₁, ON_2a/b Defects in 4H-SiC Characterized by DLTS
p.281

Identification of the Negative Carbon Vacancy at Quasi-Cubic Site in 4H-SiC by EPR and Theoretical Calculations
p.285

Defect Levels in High Purity Semi-Insulating 4H-SiC Studied by Alpha Particle Induced Charge Transient Spectroscopy
p.289

Correlation between Microwave Reflectivity and Excess Carrier Concentrations in 4H-SiC
p.293

Diffusion of Alkali Metals in SiC
p.297

Comparison of Carrier Lifetime Measurements and Mapping in 4H SiC Using Time Resolved Photoluminscence and μ-PCD
p.301

On Photoelectrical Properties of 6H-SiC Bulk Crystals PVT-Grown on 6H- and 4H-SiC Substrates
p.305

Basal Plane Dislocations from Inclusions in 4H-SiC Epitaxy
p.309

Photoluminescence Imaging and Discrimination of Threading Dislocations in 4H-SiC Epilayers
p.313

HomeMaterials Science ForumMaterials Science Forum Vols. 778-780Diffusion of Alkali Metals in SiC

Diffusion of Alkali Metals in SiC

Abstract:

Diffusion of lithium, sodium and potassium in SiC has been studied by secondary ion mass spectrometry. The alkali metal diffusion sources have been introduced by ion implantation. Subsequent anneals have been carried out in vacuum or in Ar atmosphere in the temperature range 700 °C - 1500 °C for 5 min to 16 h. The bombardment-induced defects in the vicinity of the ion implanted profile are readily decorated by the implanted . In the bulk, the diffusing alkali metals are most likely trapped and detrapped at boron and/or other defects during diffusion. The diffusivity of the studied alkali metals decreases as the mass increases, Li⁺<Na⁺<K⁺, but the sodium mobility in SiC is substantial already at 1100 °C.

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Materials Science Forum (Volumes 778-780)

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297-300

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.778-780.297

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Online since:

February 2014

Authors:

Margareta K. Linnarsson, Anders Hallén

Keywords:

Diffusion, Lithium, Potassium, SIMS, Sodium

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