Interaction Forces between Oxide and Silica-Modified Terpolymer Abrasive and their Impact on CMP and Post-CMP

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

169-172

DOI:

10.4028/www.scientific.net/SSP.134.169

Citation:

S. Armini et al., "Interaction Forces between Oxide and Silica-Modified Terpolymer Abrasive and their Impact on CMP and Post-CMP", Solid State Phenomena, Vol. 134, pp. 169-172, 2008

Online since:

November 2007

Keywords:

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.