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HomeSolid State PhenomenaSolid State Phenomena Vol. 134Interaction Forces between Oxide and...

Interaction Forces between Oxide and Silica-Modified Terpolymer Abrasive and their Impact on CMP and Post-CMP

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Periodical:

Solid State Phenomena (Volume 134)

Pages:

169-172

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.134.169

Citation:

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Online since:

November 2007

Authors:

Silvia Armini, Ruslan Burtovyy, Igor Luzinov, Caroline M. Whelan, Karen Maex, Mansour Moinpour

Keywords:

CMP, Collodial AFM, pH

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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[1] S. Armini, C. Whelan, M. Smet, S. Eslava, and K. Maex: Polymer Journal, 38 (8) (2006), 1.

[2] S. Armini, I. Vakarelski, C. Whelan, K. Maex and K. Higashitani: submitted.

[3] J. D. Feick, and D. Velegol: Langmuir, 16 (2000), 10315.

[4] J. D. Feick, N. Chukwumah, A. E. Noel, and D. Velegol: Langmuir, 20 (2004), 3090.

DOI: 10.1021/la0355545

[5] G. L. Holtzer, and D. Velegol: Langmuir, 19 (2003), 4090.

[6] S. Armini, R. Burtovyy, I. Luzinov, C. Whelan, K. Maex, and M. Moinpour: submitted. Figure 1. Pull-off force vs. pH for a) polymer, b) composite B and c) composite A particles. Two different sets of experiments are shown. Figure 2. AFM RMS roughness after CMP with different abrasive types in different pH buffer solutions. 4 5 6 7 8 9 10 -0. 5.

DOI: 10.1557/proc-0991-c08-04

0.

5.

[1] 0.

[1] 5.

[2] 0.

[2] 5.

[3] 0 Pull-off force, nN pH set I (tip1) set II (tip2) 4 5 6 7 8 9 10 -0. 5.

0.

5.

[1] 0.

[1] 5.

[2] 0 Pull-off force, nN pH set I (tip1) set II (tip1) 4 5 6 7 8 9 10 -0. 2.

0.

2.

4.

6.

8.

[1] 0.

[1] 2.

[1] 4.

[1] 6.

[1] 8.

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[2] 4 Pull-off force, nN pH set I (tip1) set II (tip1) 0.

05.

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2.

25.

3 Slurry type RMS (nm) PMMA diw PMMA pH 10 PMMA pH 4 B DIW B pH 10 B pH 4 A pH 10 A DIW A pH 4Silica DIW Silica pH 10 Silica pH 4 a b c.

DOI: 10.31030/3264267