Particle Deposition and Removal from Ge Wafers

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Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

173-176

DOI:

10.4028/www.scientific.net/SSP.134.173

Citation:

S. Sioncke et al., "Particle Deposition and Removal from Ge Wafers", Solid State Phenomena, Vol. 134, pp. 173-176, 2008

Online since:

November 2007

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$35.00

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