Oxygen Precipitation in Conventional and Nitrogen Co-Doped Heavily Arsenic-Doped Czochralski Silicon Crystals: Oswald Ripening

Abstract:

Oxygen precipitation (OP) behaviors in conventional and nitrogen co-doped heavily arsenic-doped Czocharalski silicon crystals subjected to low-high two-step anneals of 650 oC/8 h + 1000 oC/4-256 h have been comparatively investigated. Due to the nitrogen enhanced nucleation of OP during the low temperature anneal, much higher density of oxygen precipitates generated in the nitrogen co-doped specimens. With the extension of high temperature anneal, Oswald ripening of OP in the nitrogen co-doped specimens preceded that in the conventional ones. Moreover, due to the Oswald ripening effect, the oxygen precipitates in the conventional specimens became larger with a wider range of sizes. While, the sizes of oxygen precipitates in the nitrogen co-doped specimens distributed in a much narrower range with respect to the conventional ones.

• Periodical: Solid State Phenomena (Volumes 156-158)
• Pages: 275-278
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.156-158.275
• Online since: October 2009
• Authors: Xiang Yang Ma, Yan Feng, Yu Heng Zeng, De Ren Yang
• Keywords: Czochralski Silicon, Heavily Arsenic-Doped, Nitrogen Doping, Oswald Ripening, Oxygen Precipitation

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