Tris(Trimethylsilyl)Germane (Me3Si)3GeH: A Molecular Model for Sulfur Passivation of Ge(111) Surfaces

Gilbert Okorn; Roland Fischer; Beate Steller; Philipp Engesser; Harald Okorn-Schmidt

doi:10.4028/www.scientific.net/SSP.255.36

Paper Titles

Study of Oxygen Concentration in TMAH Solution for Improvement of Sigma-Shaped Wet Etching Process
p.18

The Effect of Rinsing a Germanium Surface after Wet Chemical Treatment
p.22

Effect of Dilute Hydrogen Peroxide in Ultrapure Water on SiGe Epitaxial Process
p.27

Surface Passivation of New Channel Materials Utilizing Hydrogen Peroxide and Hydrazine Gas
p.31

Tris(Trimethylsilyl)Germane (Me₃Si)₃GeH: A Molecular Model for Sulfur Passivation of Ge(111) Surfaces
p.36

Applications for Surface Engineering Using Atomic Layer Etching - Invited Paper
p.41

Towards Atomic-Layer-Scale Processing of High Mobility Channel Materials in Acidic Solutions for N5 and N7 Technology Nodes
p.51

Comparison of the Chemical Passivation of GaAs, In_0.53Ga_0.47As, and InSb with 1-Eicosanethiol
p.55

Digital Etching of GaAs Materials: Comparison of Oxidation Treatments
p.61

HomeSolid State PhenomenaSolid State Phenomena Vol. 255Tris(Trimethylsilyl)Germane (Me3Si)3GeH: A...

Tris(Trimethylsilyl)Germane (Me₃Si)₃GeH: A Molecular Model for Sulfur Passivation of Ge(111) Surfaces

Abstract:

Tristrimethylsilylgermane, (Me₃Si)₃GeH, was employed as a molecular model compound for hydrogen terminated Ge(111) surfaces. Time and temperature dependent NMR spectroscopy yielded rate constants for the reaction between (Me₃Si)₃GeH and elemental sulfur and allowed for the determination of the activation energy for this molecular model reaction to mimic germanium surface passivation.

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Solid State Phenomena (Volume 255)

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36-40

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.255.36

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Online since:

September 2016

Authors:

Gilbert Okorn*, Roland Fischer, Beate Steller, Philipp Engesser, Harald Okorn-Schmidt

Keywords:

Activation Parameters, Germanium, Kinetics, Molecular Model, NMR Spectroscopy, Sulfur, Surface Passivation

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