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HomeSolid State PhenomenaSolid State Phenomena Vols. 57-58Oxygen Precipitation in Silicon Thin Layers in the...

Oxygen Precipitation in Silicon Thin Layers in the Presence of Carbon

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Gettering and Defect Engineering in Semiconductor Technology VII

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Periodical:

Solid State Phenomena (Volumes 57-58)

Pages:

171-176

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.57-58.171

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Online since:

July 1997

Authors:

T.M. Tkacheva, G.N. Petrov, K.L. Enisherlova, T.F. Rusak

Keywords:

C Implantation, O Implantation, Oxidizing, Precipitation, Secco-Etching, TEM, VK-Etching

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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