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Heterogeneous Precipitation of Silicon Oxide in Silicon at Laser Induced Centres
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Diffusion and Precipitation of Oxygen in Silicon Doped with Germanium
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Low-Temperature Doping of P-Type Czochralski Silicon due to Hydrogen Plasma Enhanced Thermal Donor Formation
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Erbium in Silicon: Problems and Challenges
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HomeSolid State PhenomenaSolid State Phenomena Vols. 57-58Heterogeneous Precipitation of Silicon Oxide in...

Heterogeneous Precipitation of Silicon Oxide in Silicon at Laser Induced Centres

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Gettering and Defect Engineering in Semiconductor Technology VII

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Periodical:

Solid State Phenomena (Volumes 57-58)

Pages:

177-182

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.57-58.177

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Online since:

July 1997

Authors:

Yu. Blums, Arthur Medvid

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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