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HomeSolid State PhenomenaSolid State Phenomena Vols. 57-58Thermal Donors in Silicon Doped with Erbium

Thermal Donors in Silicon Doped with Erbium

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Gettering and Defect Engineering in Semiconductor Technology VII

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Periodical:

Solid State Phenomena (Volumes 57-58)

Pages:

207-212

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.57-58.207

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Online since:

July 1997

Authors:

Valentin V. Emtsev, N.A. Sobolev, Boris A. Andreev, D.S. Poloskin, Elena I. Shek

Keywords:

Erbium, Silicon, Thermal Donor

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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