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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84A Technique for Delineating Defects in Silicon

A Technique for Delineating Defects in Silicon

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Gettering and Defect Engineering in Semiconductor Technology IX

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

753-758

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.753

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Online since:

November 2001

Authors:

Luciano Mule'Stagno

Keywords:

Copper (Cu), Etching, Interstitial, Interstitial Defects

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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