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Gettering and Defect Engineering in Semiconductor Technology VII

Volumes 57 - 58
doi: 10.4028/www.scientific.net/SSP.57-58
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Paper Title Page

Preface

4

Design: New Material Challenge for Silicon ULSI

Authors: Lionel C. Kimerling

1

Silicon Wafer Technology: The Challenges towards the Gigabit Era

Authors: A.P. Mozer

9

Hydrogen Annealed Silicon Wafer

Authors: S. Nadahara, H. Kubota, S. Samata

19

Formation of Microscopic Distribution of Grown-In Defects in Czochralski Silicon Crystal

Authors: R. Habu, Kazuto Kawakami, Mitsuhiro Hasebe

27

CZ Crystal Growth Development in Super Silicon Crystal Project

Authors: H. Yamagishi, M. Kuramoto, Y. Shiraishi, M. Machida, K. Takano, N. Takase, T. Iida, J. Matsubara, Kazuya Takada

37

Gettering by Voids in Silicon: A Comparison with other Techniques

Authors: Vito Raineri

43

Gettering in Advanced Low Temperature Processes

Authors: S. Sadamitsu, S. Ogushi, Y. Koike, N. Reilly, T. Nagashima, Mizuka Sano, H. Tsuya

53

Metal Gettering by Defective Regions in Carbon-Implanted Silicon

Authors: Reinhard Kögler, J.R. Kaschny, R.A. Yankov, P. Werner, A.B. Danilin, Wolfgang Skorupa

63

Metallic Impurity Gettering in MeV Implanted Si

Authors: O.V. Kononchuk, R.A. Brown, Sergei V. Koveshnikov, K.L. Beaman, F. Gonzalez, George A. Rozgonyi

69

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