Paper Title
Authors: Wei Wang, Xiao Wei Liu, Shan Shan Chen, Xin Wang, Shao Feng Li, Yun Sen Wu
NEMS/MEMS Technology and Equipment
Abstract:The orifice which formed by the sudden change of channel’s scale on microfluidic chip and its application have introduced in this paper. The...
Authors: Fang Rong Hu, Man E Chen, Jing Xiao, Wei Yu, Jun Hao Niu, Kun Nie
NEMS/MEMS Technology and Equipment
Abstract:Four types of MEMS actuators are presented in this paper. The effect of structure on three major performance parameters of these actuators,...
Authors: Zhen Wan, Feng Cui, Yun Kui Zhang, Wu Liu, Wen Yuan Chen, Wei Ping Zhang
NEMS/MEMS Technology and Equipment
Abstract:A six-axis Micromachined Electrostatically Suspended Accelerometer (MESA) which is based on LIGA-type microfabrication was designed. MESA...
Authors: Yu Hua Guo, Ying Nan Wang, Long Han Xie
NEMS/MEMS Technology and Equipment
Abstract:In recent years an increasing interest has grown in using Micro Electro Mechanical System (MEMS) fabrication technology in mechanical...
Authors: Ming Chang, Chung Po Lin, Hong Jun Chen
NEMS/MEMS Technology and Equipment
Abstract:With the rapid expansion of nanotechnology, assembling nano-materials and to create electrical/mechanical devices at micro and nano scales...
Authors: Gao Fa He, Wei Gao
NEMS/MEMS Technology and Equipment
Abstract:The cantilever with a high-aspect-ratio and long probe is a key sub-system of the atomic force microscopes (AFMs) used to measure the surface...
Authors: Zheng Liu, Hua Chen
NEMS/MEMS Technology and Equipment
Abstract:This paper concentrates on how to generate manufacturing flow from the feature model of surface micromachined device. Firstly, the...
Authors: Yi Zhuo Zhang, Da Yong Wang, Pu Hui Meng, Yun Xin Wang
NEMS/MEMS Technology and Equipment
Abstract:MEMS is believed as a most promising technology in future. DHM is a powerful technique to characterize the behavior of MEMS. In the...
Authors: Sheng Zhu Cao, Xue Kang Chen, Gan Wu, Jian Ping Yang, Rui Wang
NEMS/MEMS Technology and Equipment
Abstract:Micro and Nano-satellites with their low thermal capacitance are vulnerable to rapid temperature fluctuations. Therefore, thermal control...
Authors: Ze Hua Hu, Wei Qiang Gao, Chao Ting Qing, Cheng Sheng Fang
NEMS/MEMS Technology and Equipment
Abstract:Taking A-C axis dual rotary working table of 5-axis CNC system as an example, the function of RTCP is introduced and the performing...
Showing 311 to 320 of 484 Paper Titles