Equipment Manufacturing Technology and Automation

Volumes 317-319

doi: 10.4028/

Paper Title Page

Authors: Wei Wang, Xiao Wei Liu, Shan Shan Chen, Xin Wang, Shao Feng Li, Yun Sen Wu

Abstract: The orifice which formed by the sudden change of channel’s scale on microfluidic chip and its application have introduced in this paper. The...

Authors: Fang Rong Hu, Man E Chen, Jing Xiao, Wei Yu, Jun Hao Niu, Kun Nie

Abstract: Four types of MEMS actuators are presented in this paper. The effect of structure on three major performance parameters of these actuators,...

Authors: Zhen Wan, Feng Cui, Yun Kui Zhang, Wu Liu, Wen Yuan Chen, Wei Ping Zhang

Abstract: A six-axis Micromachined Electrostatically Suspended Accelerometer (MESA) which is based on LIGA-type microfabrication was designed. MESA...

Authors: Yu Hua Guo, Ying Nan Wang, Long Han Xie

Abstract: In recent years an increasing interest has grown in using Micro Electro Mechanical System (MEMS) fabrication technology in mechanical...

Authors: Ming Chang, Chung Po Lin, Hong Jun Chen

Abstract: With the rapid expansion of nanotechnology, assembling nano-materials and to create electrical/mechanical devices at micro and nano scales...

Authors: Gao Fa He, Wei Gao

Abstract: The cantilever with a high-aspect-ratio and long probe is a key sub-system of the atomic force microscopes (AFMs) used to measure the...

Authors: Zheng Liu, Hua Chen

Abstract: This paper concentrates on how to generate manufacturing flow from the feature model of surface micromachined device. Firstly, the...

Authors: Yi Zhuo Zhang, Da Yong Wang, Pu Hui Meng, Yun Xin Wang

Abstract: MEMS is believed as a most promising technology in future. DHM is a powerful technique to characterize the behavior of MEMS. In the...

Authors: Sheng Zhu Cao, Xue Kang Chen, Gan Wu, Jian Ping Yang, Rui Wang

Abstract: Micro and Nano-satellites with their low thermal capacitance are vulnerable to rapid temperature fluctuations. Therefore, thermal control...

Authors: Ze Hua Hu, Wei Qiang Gao, Chao Ting Qing, Cheng Sheng Fang

Abstract: Taking A-C axis dual rotary working table of 5-axis CNC system as an example, the function of RTCP is introduced and the performing...


Showing 311 to 320 of 484 Paper Titles