Low-Inductance Packaging Design for SiC Power MOSFET Modules

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With the continuous advancement of SiC device design and manufacturing processes, devices of the same ratings are achieving higher turn-on speeds and smaller chip areas. These improvements enhance the speed and power density of power electronic systems but also pose greater challenges for thermal management and the parasitic parameters of packaging. To address these issues, this paper proposes a multi-chip SiC power module packaging structure based on a multilayer ceramic substrate. Compared to a conventional single-layer DBC substrate, the multilayer substrate structure incorporates an additional intermediate copper layer, which serves as a current return path. Due to the close proximity between this return path and the upper copper layer, the overall loop area is reduced, thereby lowering the parasitic loop inductance. Simulation results show that the designed 800 V, 50 kW SiC power module achieves a parasitic loop inductance of around 3.22 nH at 10 MHz. In addition, traditional multilayer DBC structures are typically formed by soldering two separate DBC substrates together. Such soldered interfaces are often mechanically unstable, and electrical continuity between the upper and intermediate copper layers is not established. The structure proposed in this work adopts a monolithic substrate, in which a single 300 μm thick copper layer is embedded without the use of additional solder. Compared to conventional multilayer substrates, this configuration offers improved thermal conduction by eliminating solder interfaces and enhancing heat flow.

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143-148

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May 2026

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