Gate Leakage Imaging of Silicon Carbide Power MOSFETs under Negative-Bias Gate Stress

Article Preview

Abstract:

Visible light emission was observed for negative-bias gate stress of n-channel power MOSFETs in 4H-SiC. The emission intensity is approximately proportional to the current through the gate oxide; and its pattern follows the configuration of active MOSFET channels. We relate the emission to recombination of the electrons injected from the gate into the oxide with valence-band holes from SiC at the surface states at the SiC-to-oxide interface. The gate leakage imaging technique may be helpful for locating different types of gate oxide current crowding, which crowding might cause enhanced wear-out of the gates and early device failure.

You have full access to the following eBook

Info:

Periodical:

Pages:

7-12

Citation:

Online since:

May 2026

Export:

Share:

Citation:

* - Corresponding Author

[1] P. J. Macfarlane, and R. E. Stahlbush, "Characterization of light emission from 4H and 6H SiC MOSFETs," MRS Online Proceedings Library 640, 49 (2000).

DOI: 10.1557/proc-640-h4.9

Google Scholar

[2] R. E. Stahlbush, P. J. Macfarlane, J. R. Williams, G. Y. Chung, L. C. Feldman, K. McDonald, "Light emission from 4H SiC MOSFETs with and without NO passivation," Microelectronic engineering, 59 (2001), pp.393-398.

DOI: 10.1016/s0167-9317(01)00674-8

Google Scholar

[3] M. W. Feil, H. Reisinger, A. Kabakow, et al., "Electrically stimulated optical spectroscopy of interface defects in wide-bandgap field-effect transistors," Communications Engineering 2, 5 (2023).

DOI: 10.1038/s44172-023-00053-8

Google Scholar

[4] L. Anoldo, E. Zanetti, W. Coco, A. Russo, P. Fiorenza, and F. Roccaforte, "4H-SiC MOSFET Threshold Voltage Instability Evaluated via Pulsed High-Temperature Reverse Bias and Negative Gate Bias Stresses". Materials, 17(8), 1908 (2024).

DOI: 10.3390/ma17081908

Google Scholar

[5] T. Liu, S. Zhu, S. Yu, et al., "Gate Leakage Current and Time-Dependent Dielectric Breakdown Measurements of Commercial 1.2 kV 4H-SiC Power MOSFETs," 2019 IEEE 7th Workshop on Wide Bandgap Power Devices and Applications (WiPDA), Raleigh, NC, USA, 2019, pp.195-199.

DOI: 10.1109/wipda46397.2019.8998792

Google Scholar

[6] D. J. DiMaria, E. Cartier, D. A. Buchanan, "Anode hole injection and trapping in silicon dioxide," Journal of Applied Physics, 80 (1996), pp.304-317.

DOI: 10.1063/1.362821

Google Scholar

[7] Z. A. Weinberg, M. V. Fischetti, "Investigation of the SiO2‐induced substrate current in silicon field‐effect transistors," Journal of Applied Physics, 57 (1985), pp.443-452.

DOI: 10.1063/1.334771

Google Scholar

[8] M. Sometani, D. Okamoto, S. Harada, et al., "Temperature-dependent analysis of conduction mechanism of leakage current in thermally grown oxide on 4H-SiC," Journal of Applied Physics, 117, 024505 (2015).

DOI: 10.1063/1.4905916

Google Scholar