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Materials Science Forum Vols. 185-188

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.185-188

ToC:

Table of Contents

Paper Title Page

Influence of Tunneling on Trapping Kinetics in Thin Layers
Authors: S. Scharf, M. Schmidt, D. Bräunig
91
On the Nature of the Radiation-Induced Failure of Si-SiO2 Structures Annealed in Hydrogen
Authors: S.N. Kuznetsov, V.A. Gurtov
99
Characteristics of Si-SiO2 Systems Obtained by Thermal Oxidation of Silicon Surface Covered with Silicon-Hydrogen Layers
Authors: V.Y. Uritsky, B.B. Loginov
105
Passivation and Depassivation of Electrically Active Centers in the Polysilicon-Oxide-Silicon Structures
Authors: I.A. Uritskaya, V.Y. Uritsky
109
Role of Electron / Hole Processes in the Initial Stage of Silicon Anodization
Authors: V.X. Uritsky
115
Effect of Structure of Hydrogenated SiNx:H Films on the Dissociation Mechanism of Si-H and N-H Bonds
Authors: E.B. Gorokhov, A.G. Noskov, V.V. Vasilyev, E.M. Trukhan, V.N. Ovsyuk, G.Yu. Salieva
119
Stress Generation and Relaxation in Passivating Films and its New Application in Nanolitography
Authors: E.B. Gorokhov, A.G. Noskov, V.Ya. Prinz
129
High Resolution Surface Characterisation Using STM Light Emission Techniques
Authors: J. Horn, N. Marx, B.L. Weiss, H.L. Hartnagel, M. Stehle, M.M. Bischoff, H. Pagnia
145
Passivation of Semiconductors by the Remote Plasma Technique
Authors: Wilhelm Kulisch, F. Kiel, M. Schiller, S. Reinke, R. Kassing
155
AES Study of the GaAs-Germanium Oxynitride Interface
Authors: D. Jishiashvili, R. Dzhanelidze, Z. Shiolashvili, I. Nakhutsrishvili
165

Showing 11 to 20 of 117 Paper Titles

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