Growth and Characterisation of Thick SiC Epilayers by High Temperature CVD

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Periodical:

Materials Science Forum (Volumes 264-268)

Edited by:

G. Pensl, H. Morkoç, B. Monemar and E. Janzén

Pages:

103-106

Citation:

A. Ellison et al., "Growth and Characterisation of Thick SiC Epilayers by High Temperature CVD", Materials Science Forum, Vols. 264-268, pp. 103-106, 1998

Online since:

February 1998

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