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HomeMaterials Science ForumMaterials Science Forum Vols. 353-356Observation of SiO2/SiC Interface with Different...

Observation of SiO₂/SiC Interface with Different Off-Angle from Si(0001) Face Using Transmission Electron Microscopy

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Silicon Carbide and Related Materials 2000

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Periodical:

Materials Science Forum (Volumes 353-356)

Pages:

647-650

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.353-356.647

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Online since:

January 2001

Authors:

Kenji Fukuda, Seiji Suzuki, Junji Senzaki, Ryouji Kosugi, Tomoyuki Tanaka, Kazuo Arai

Keywords:

Channel Mobility, Off-Angle, Polytype, SiO₂/SiC Interface, TEM

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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