Observation of SiO2/SiC Interface with Different Off-Angle from Si(0001) Face Using Transmission Electron Microscopy

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Periodical:

Materials Science Forum (Volumes 353-356)

Edited by:

G. Pensl, D. Stephani and M. Hundhausen

Pages:

647-650

DOI:

10.4028/www.scientific.net/MSF.353-356.647

Citation:

K. Fukuda et al., "Observation of SiO2/SiC Interface with Different Off-Angle from Si(0001) Face Using Transmission Electron Microscopy", Materials Science Forum, Vols. 353-356, pp. 647-650, 2001

Online since:

January 2001

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$35.00

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