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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Impact of the Initial Surface Conditions on Defect...

Impact of the Initial Surface Conditions on Defect Appearance in 4H-SiC Epilayers

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

283-286

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.283

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Online since:

April 2002

Authors:

Rositza Yakimova, Henrik Jacobsson, Mikael Syväjärvi, A. Kakanakova-Georgieva, T. Iakimov, Charíya Virojanadara, Leif I. Johansson, Erik Janzén

Keywords:

4H-SiC, Epitaxial Layer, Extended Defects, Surface Graphite Layer

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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