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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393

Materials Science Forum Vols. 389-393

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393

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Paper Title Page

Oxidation-Induced Crystallographic Transformation in Heavily N-Doped 4H-SiC Wafers

Authors: B.J. Skromme, K. Palle, C.D. Poweleit, L.R. Bryant, William M. Vetter, Michael Dudley, K. Moore, T. Gehoski

455

Investigation of the Relationship between Defects and Electrical Properties of 3C-SiC Epilayers

Authors: Yuuki Ishida, Mitsuhiro Kushibe, Tetsuo Takahashi, Hajime Okumura, Sadafumi Yoshida

459

RHEED: A Tool for Structural Investigations of Thin Polytypic SiC Layers

Authors: F. Scharmann, Joerg Pezoldt

463

Electron-Irradiation-Induced Amorphization of 6H-SiC by 300 keV Transmission Electron Microscope Equipped with a Field-Emission Gun

Authors: In-Tae Bae, Manabu Ishimaru, Yoshihiko Hirotsu

467

The Nature and Diffusion of Intrinsic Point Defects in SiC

Authors: M. Bockstedte, Matthias Heid, Alexander Mattausch, Oleg Pankratov

471

Theoretical Investigation of an Intrinsic Defect in SiC

Authors: Adam Gali, Peter Deák, Nguyen Tien Son, Erik Janzén

477

Carbon Interstitials in SiC: A Model for the D_II Center

Authors: Alexander Mattausch, M. Bockstedte, Oleg Pankratov

481

Chemical Environment of Atomic Vacancies in Electron Irradiated Silicon Carbide Measured by a 2D-Doppler Broadening Technique

Authors: Al. Rempel, K. Blaurock, K.J. Reichle, W. Sprengel, Hans Eckhardt Schaefer

485

Radiation-Induced Defects in 4H- and 6H-SiC Epilayers Studied by Positron Annihilation and Deep-Level Transient Spectroscopy

Authors: Atsuo Kawasuso, Michael Weidner, F. Redmann, Thomas Frank, Reinhard Krause-Rehberg, Gerhard Pensl, Peter Sperr, Werner Triftshäuser, Hisayoshi Itoh

489

Vacancy Defects in As-Polished and in High-Fluence H⁺-Implanted 6H-SiC Detected by Slow Positron Annihilation Spectroscopy

Authors: Marie France Barthe, P. Desgardin, L. Henry, C. Corbel, D.T. Britton, Gottfried Kögel, Peter Sperr, Werner Triftshäuser, Patrice Vicente, L. diCioccio

493