Radical Nitridation of Ultra-Thin SiO2/SiC Structure

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

1333-1336

DOI:

10.4028/www.scientific.net/MSF.457-460.1333

Citation:

H. Yano et al., "Radical Nitridation of Ultra-Thin SiO2/SiC Structure", Materials Science Forum, Vols. 457-460, pp. 1333-1336, 2004

Online since:

June 2004

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$35.00

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