Potential of HMDS/C3H8 Precursor System for the Growth of State of the Art Heteroepitaxial 3C-SiC Layers on Si(100)

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Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

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281-284

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G. Ferro et al., "Potential of HMDS/C3H8 Precursor System for the Growth of State of the Art Heteroepitaxial 3C-SiC Layers on Si(100) ", Materials Science Forum, Vols. 457-460, pp. 281-284, 2004

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June 2004

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DOI: https://doi.org/10.1016/s0040-6090(01)01597-8

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