Potential of HMDS/C3H8 Precursor System for the Growth of State of the Art Heteroepitaxial 3C-SiC Layers on Si(100)

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

281-284

DOI:

10.4028/www.scientific.net/MSF.457-460.281

Citation:

G. Ferro et al., "Potential of HMDS/C3H8 Precursor System for the Growth of State of the Art Heteroepitaxial 3C-SiC Layers on Si(100) ", Materials Science Forum, Vols. 457-460, pp. 281-284, 2004

Online since:

June 2004

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$35.00

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