Excitation Power Dependence of Al-Related Features in the LTPL Spectra of 4H-SiC

Abstract:

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Recently, a systematic comparison of SIMS measurements with LTPL (Low Temperature Photoluminescence) spectra led us to propose a straightforward empirical calibration of the LTPL intensity versus Al content in 4H-SiC samples. In the present work we analyze the effect of the LTPL excitation power on the intensity of the Al-related features. We examine the influence of the excitation conditions on the calibration curve and determine the limitations of the method.

Info:

Periodical:

Materials Science Forum (Volumes 483-485)

Edited by:

Roberta Nipoti, Antonella Poggi and Andrea Scorzoni

Pages:

449-452

DOI:

10.4028/www.scientific.net/MSF.483-485.449

Citation:

M. Zielinski et al., "Excitation Power Dependence of Al-Related Features in the LTPL Spectra of 4H-SiC", Materials Science Forum, Vols. 483-485, pp. 449-452, 2005

Online since:

May 2005

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Price:

$35.00

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