Excitation Power Dependence of Al-Related Features in the LTPL Spectra of 4H-SiC
Recently, a systematic comparison of SIMS measurements with LTPL (Low Temperature Photoluminescence) spectra led us to propose a straightforward empirical calibration of the LTPL intensity versus Al content in 4H-SiC samples. In the present work we analyze the effect of the LTPL excitation power on the intensity of the Al-related features. We examine the influence of the excitation conditions on the calibration curve and determine the limitations of the method.
Roberta Nipoti, Antonella Poggi and Andrea Scorzoni
M. Zielinski et al., "Excitation Power Dependence of Al-Related Features in the LTPL Spectra of 4H-SiC", Materials Science Forum, Vols. 483-485, pp. 449-452, 2005