TEM Observation of the Polytype Transformation of Bulk SiC Ingot

Abstract:

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This article describes the analysis of the polytype transformation of SiC ingot. We analyzed the sample by Raman spectroscopy and TEM observation. The result of the analysis shows the polytype is transformed from 4H-SiC to 6H-SiC, and then returned to 4H-SiC. We found that the direction of the c-axis is not the same as the growth direction of the ingot. And also we found the existence of 8H-SiC at the interface between 6H-SiC and 4H-SiC region by the selected area diffraction pattern and confirmed it by HR-TEM observation.

Info:

Periodical:

Materials Science Forum (Volumes 600-603)

Edited by:

Akira Suzuki, Hajime Okumura, Tsunenobu Kimoto, Takashi Fuyuki, Kenji Fukuda and Shin-ichi Nishizawa

Pages:

365-368

DOI:

10.4028/www.scientific.net/MSF.600-603.365

Citation:

M. Aoki et al., "TEM Observation of the Polytype Transformation of Bulk SiC Ingot", Materials Science Forum, Vols. 600-603, pp. 365-368, 2009

Online since:

September 2008

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Price:

$35.00

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