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Materials Science Forum Vols. 83-87

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.83-87

ToC:

Table of Contents

Paper Title Page

Interstitial Defect Reactions in Silicon Processed by Reactive Ion Etching
Authors: J.L. Benton, M.A. Kennedy, Jürgen Michel, Lionel C. Kimerling
1433
Anomalous Damage Depths in Low-Energy Ion Beam Processed III-V Semiconductors
Authors: Stephen J. Pearton, F. Ren, T.R. Fullowan, R.F. Kopf, W.S. Hobson, C.R. Abernathy, A. Katz, U.K. Chakrabarti, V. Swaminathan
1439
Photoluminescence Characterisation of the Silicon Surface Exposed to Plasma Treatment
Authors: Anne Henry, Bo Monemar, J. Lennart Lindström, T.D. Bestwick, G.S. Oehrlein
1445
An Analysis of Point Defect Fluxes during SiO2 Precipitation in Silicon
Authors: W.J. Taylor, T.Y. Tan, U.M. Gösele
1451
Deep States Associated with Copper Decorated Oxidation Induced Stacking Faults in Silicon
Authors: M. Kaniewska, J. Kaniewski, Anthony R. Peaker
1457
Electrical Properties of Oxidation-Induced Stacking Faults in N-Type Silicon
Authors: J. Kaniewski, M. Kaniewska, Anthony R. Peaker
1463
Study of Internal Oxide Gettering for CZ Silicon: Effects of Oxide Particle Size and Number Density and Assessment of Thermal Stability of Gettering for Copper and Nickel
Authors: Z. Laczik, G.R. Booker, Robert J. Falster, Péter Török
1469
Morphology Change of Oxygen Precipitates in Cz-Si Wafers during Two-Step Heat-Treatment
Authors: Mitsuhiro Hasebe, James W. Corbett, Kazuto Kawakami
1475
Annealing of Damage in GaAs and InP after Implantation of Cd and In
Authors: Wulf Pfeiffer, Manfred Deicher, R. Kalish, R. Keller, R. Magerle, N. Moriya, P. Pross, H. Skudlik, Th. Wichert, Herbert Wolf
1481
Ion Implantation Induced Sheet Stress due to Defects in Thin (100) Silicon Films
Authors: Jian Zhong Yuan, Andrew J. Yencha, James W. Corbett
1487

Showing 221 to 230 of 242 Paper Titles

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