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HomeSolid State PhenomenaSolid State Phenomena Vols. 51-52

Solid State Phenomena Vols. 51-52

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.51-52

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Paper Title Page

Preparation of Low Temperature Polysilicon Films with SiH₄ and SiF₄ Gas Mixtures

Authors: H.S. Choi, K.H. Jang, Min Koo Han

149

Structural Studies of Annealing Effects on Semi-Insulating Polycrystalline Layers Obtained by Using Disilane

Authors: J.J. Pedroviejo, B. Garrido, J.R. Morante, E. Dehan, E. Scheid

155

Growth of n-Type Microcrystalline Silicon at Different Plasma Excitation Frequencies

Authors: P. Hapke, M. Luysberg, Reinhard Carius, M. Tzolov, F. Finger, H. Wagner

161

On the Nanostructure of Hydrogenated Silicon

Authors: S.B. Aldabergenova, M. Albrecht, K. Tauasarov, D. Stenkamp, T.I. Taurbaev, B. Dietrich, Horst P. Strunk

167

Time Resolved Reflectivity Studies of Phase Transitions in Polycrystalline Si Induced by Excimer Laser Irradiation

Authors: I. Ulrych, M. Cerník, K.M.A. El-Kader, P. Prikryl, R. Cerný, Z. Chvoj, V. Cháb

173

Characterization of Low Pressure Chemical Vapor Deposited Polysilicon Using Ellipsometry

Authors: L. Asinovsky, S. Fox, E. Karagiannis, M. Schroth, J.J. Sweeney

179

Correlation between the Hydrogen Bonding Configurations in Amorphous Sputtered Silicon and the Crystallized Material Microstructure

Authors: L. Lusson, A. Lusson, A. Correia, D. Ballutaud

187

Growth and Defect Formation in Thin Ge and Si_0.8Ge_0.2 Layers Ion Beam Sputter Deposited on Si(001)

Authors: W. Dorsch, V. Demuth, Horst P. Strunk, N. Mosleh, F. Meyer, C. Schwebel

193

Microstructure Influence on the First Stage of the Oxidation Process in Polycrystalline SiGe Layers

Authors: J.C. Ferrer, J.J. Pedroviejo, B. Garrido, J.R. Morante, J. Calderer

199

Surface Defect States of Crystallites in Sputtered Amorphous Silicon Films

Authors: Yukie Nakano, J. Sakata, Y. Taga

205

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