Gettering and Defect Engineering in Semiconductor Technology X
Solid State Phenomena Volumes 95 - 96
doi:10.4028/www.scientific.net/SSP.95-96
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p433
Influence of Magnetic Field on Critical Stress and Mobility of Dislocations in Silicon
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74 K
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Authors: M. Badylevich, Yu.L. Iunin, Vitaly V. Kveder, Valeri I. Orlov, Yu. Osipyan
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p439
Dislocation Generation in Device Fabrication Process
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204 K
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Authors: Isabella Mica, Maria Luisa Polignano, G.P. Carnevale, Aldo Armigliato, R. Balboni, M. Brambilla, F. Cazzaniga, Giuseppe Pavia, V. Soncini
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p447
Microstructural and Electrical Properties of NiSi2 Precipitates at Dislocations in Silicon
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513 K
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Authors: Michael Seibt, Vitaly V. Kveder
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p453
Electrical and Optical Properties of Dislocations Generated under Pure Conditions
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64 K
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Authors: Maurizio Acciarri, Simona Binetti, Olga V. Feklisova, E.A. Steinman, Eugene B. Yakimov
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p459
Effect of Dynamic Aging of Dislocations on the Deformation Behavior of Extrinsic Semiconductors
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66 K
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Authors: B.V. Petukhov
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p465
Influence of Nitrogen on Dislocation Mobility in Czochralski Silicon
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67 K
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Authors: Valeri I. Orlov, Yu.L. Iunin, M. Badylevich, O. Lysytskiy, Hans Richter
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p473
Precise Measurement of Ge Depth Profiles in SiGe HBT's - a Comparison of Different Methods
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1 M
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Authors: P. Zaumseil, D. Krüger, R. Kurps, O.V. Fursenko, Peter Formanek
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p483
Capacitance-Transient Detection of X-Ray Absorption Fine Structure: A Possible Tool to Analyze the Structure of Deep-Level Centers?
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300 K
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Authors: Joerg Weber, J. Bollmann, S. Knack, V. Kotestki, H.E. Mahnke, E. Welter
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p489
Measurement of Nitrogen Concentration in Cz Silicon Crystals
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226 K
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Authors: N. Inoue, A. Hashimoto, K. Shingu, K. Masumoto
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p495
Gold Diffusion as a Tool for Defect Characterization in Si
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304 K
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Authors: Olga V. Feklisova, Eugene B. Yakimov
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p501
Infrared Transmission Investigations of Rod - Like Defects in Multicrystalline Silicon
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491 K
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Authors: Alexander Lawerenz, Michael Ghosh, K. Kremmer, V. Klemm, Armin Müller, Hans Joachim Möller
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p507
Atomic Environment of Positrons Annihilating in Different Parts of Cz-Si Single Crystal
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62 K
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Authors: N.Yu. Arutyunov, Reinhard Krause-Rehberg
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p513
Residual Stress Distribution and Silicon Phase Transformation Induced by Rockwell Indentation at Different Temperatures, Studied by Means of Micro-Raman Spectroscopy
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854 K
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Authors: Simona Kouteva-Arguirova, Valeri I. Orlov, Winfried Seifert, Jürgen Reif, Hans Richter
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p519
Investigation of Semiconductors by Nanoindentation
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758 K
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Authors: Asta Richter, Bodo Wolf, Joseph BelBruno
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p527
Phosphorus Diffusion Gettering of Metallic Impurities in Silicon: Mechanisms beyond Segregation
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125 K
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Authors: Wolfgang Schröter, A. Döller, A. Zozime, Vitaly V. Kveder, Michael Seibt, E. Spiecker