Micro and Nano Technology

Volumes 60-61

doi: 10.4028/www.scientific.net/AMR.60-61

Paper Title Page

Authors: Min Zhuo, An Ding Chen, Jian Zhu, Long Zhang

Abstract: This paper presents deep-hole etching process by inductively coupled plasma (ICP),the hole is higher than 400um ,and its diameter is 200um...

Authors: Xin Yan, Zhi Chun Ma, Xu Yuan Chen

Abstract: In this paper, a Z-axis micromachined gyroscope with a new decoupled design was presented. The gyroscope consists of dual proof mass, sense...

Authors: Shi Xing Jia, Long Zhang, Jian Zhu

Abstract: A method of fabrication of micro via-hole by wet-etching of Pyrex glass is presented in the paper. The through holes with double...

Authors: Yi Wu Ma, Li Sheng Gao, Hui Min Chang, Zao Chun Zhang, Ying Xian Wang

Abstract: This paper discusses the nonlinear errors for a novel gap variation-type thick film capacitive micro-displacement sensor. The...

Authors: Chun Xiu Liu, Hong Min Liu, Qing De Yang, Nan Sen Lin, Yi Lin Song, Li Wang, Xin Xia Cai

Abstract: A biosensor based on gold electrode modified by Pt nanaoparticles/Osmium redox polymer/Nafion trilayer film was fabricated and used for...

Authors: W.W. Zhang, Qing An Huang, H. Yu, L.B. Lu

Abstract: Molecular dynamics simulations are carried out to characterize the mechanical properties of [001] and [110] oriented silicon nanowires, with...

Authors: Jhi Zhou Sun, Chao Bian, Lan Qu, Shan Hong Xia

Abstract: A new method has been developed and applied in a micro amperometric immunosensor to immobilize antibody with electropolymerized...

Authors: Jing Wu, Shi Xing Jia, Yun Xiang Wang, Jian Zhu

Abstract: The study is performed to implement the Gold-Gold thermocompression bonding for the wafer-level packaging of MEMS chips. Numerous...

Authors: Wei Chih Chen, Ting Fu Hong, Wen Bo Luo, Chang Hsien Tai, Chien Hsiung Tsai, Lung Ming Fu

Abstract: This paper presented a parametric experimental study of electrokinetic instability phenomena in a cross-shaped configuration microfluidic...

Authors: Hong Yu Ma, Qin Gan Huang, Ming Qin

Abstract: A design and simulation of a fully CMOS compatible micromachined multilayer cantilevers-based environmental thermometer are presented. The...


Showing 61 to 70 of 99 Paper Titles