Damage in III-V Semiconductors from very Low-Energy Process Plasmas

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Periodical:

Defect and Diffusion Forum (Volumes 183-185)

Edited by:

D.J. Fisher

Pages:

61-76

DOI:

10.4028/www.scientific.net/DDF.183-185.61

Citation:

M. Rahman "Damage in III-V Semiconductors from very Low-Energy Process Plasmas", Defect and Diffusion Forum, Vols. 183-185, pp. 61-76, 2000

Online since:

August 2000

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$35.00

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