2x Current Boosting Scheme in 3300 v 4H-SiC VDMOSFET

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Abstract:

We experimentally demonstrated a ~2x on-current enhancement in VDMOSFET fabricated in a standard 3300 V-rated 4H-SiC process. The on-current improvement is achieved by applying a positive bias to the p-well region when the VDMOSFET is in the on-state. A 5x103-104 ratio between the on-current gain and the p-well current gain is shown. TCAD simulations are performed to study the underlying mechanisms of the on-current gain.

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