Short-Circuit Reliability Analysis of SG-MOSFETs vs Planar 4H-SiC MOSFETs

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Abstract:

This work investigates the short-circuit (SC) reliability of Split-Gate (SG) versus planar 4H-SiC MOSFETs through TCAD simulations. While SG-MOSFETs effectively reduce gate-drain capacitance and improve switching performance, SG-MOSFETs exhibit enhanced short-circuit failure effects. Structural optimization—such as thicker drift regions, extended gate lengths, and narrowed JFET widths—can improve SC withstand time (SCWT). However, SG-MOSFETs suffer from intensified electric field crowding and enhanced drain-induced barrier lowering (DIBL), leading to greater post-SC leakage and thermal instability. Results suggest SG-MOSFETs require careful field and oxide engineering to ensure reliability under fault conditions.

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[1] P. Samanta and K. C. Mandal, "Hole injection and dielectric breakdown in 6H–SiC and 4H–SiC metal–oxide–semiconductor structures during substrate electron injection via Fowler–Nordheim tunneling," Solid-State Electronics, vol. 114, pp.60-68, 2015.

DOI: 10.1016/j.sse.2015.07.009

Google Scholar

[2] S. Singh, T. Chaudhary, and G. Khanna, "Recent advancements in wide band semiconductors (SiC and GaN) technology for future devices," Silicon, vol. 14, no. 11, pp.5793-5800, 2022.

DOI: 10.1007/s12633-021-01362-3

Google Scholar

[3] T.-T. Nguyen, A. Ahmed, T. Thang, and J.-H. Park, "Gate oxide reliability issues of SiC MOSFETs under short-circuit operation," IEEE Transactions on Power Electronics, vol. 30, no. 5, pp.2445-2455, 2014.

DOI: 10.1109/tpel.2014.2353417

Google Scholar

[4] M. Okawa et al., "First demonstration of short-circuit capability for a 1.2 kV SiC SWITCH-MOS," IEEE Journal of the Electron Devices Society, vol. 7, pp.613-620, 2019.

DOI: 10.1109/jeds.2019.2917563

Google Scholar

[5] G. Romano et al., "Short-circuit failure mechanism of SiC power MOSFETs," in 2015 IEEE 27th International Symposium on Power Semiconductor Devices & IC's (ISPSD), 2015: IEEE, pp.345-348.

DOI: 10.1109/ispsd.2015.7123460

Google Scholar

[6] G. Romano et al., "A comprehensive study of short-circuit ruggedness of silicon carbide power MOSFETs," IEEE Journal of Emerging and Selected Topics in Power Electronics, vol. 4, no. 3, pp.978-987, 2016.

DOI: 10.1109/jestpe.2016.2563220

Google Scholar

[7] A. Agarwal, K. Han, and B. J. Baliga, "2.3 kV 4H-SiC accumulation-channel split-gate planar power MOSFETs with reduced gate charge," IEEE Journal of the Electron Devices Society, vol. 8, pp.499-504, 2020.

DOI: 10.1109/jeds.2020.2991355

Google Scholar

[8] H. Liu, J. Wei, Z. Wei, S. Liu, and L. Shi, "Experimental comparison of a new 1.2 kV 4H-SiC split-gate MOSFET with conventional SiC MOSFETs in terms of reliability robustness," Electronics, vol. 12, no. 11, p.2551, 2023.

DOI: 10.3390/electronics12112551

Google Scholar

[9] K. Shin, D. Kim, M. Kim, J. Park, and C. Han, "Enhanced Short-Circuit Robustness of 1.2 kV Split Gate Silicon Carbide Metal Oxide Semiconductor Field-Effect Transistors for High-Frequency Applications," Electronics, vol. 14, no. 1, p.163, 2025.

DOI: 10.3390/electronics14010163

Google Scholar

[10] B. J. Baliga, Advanced power MOSFET concepts. Springer Science & Business Media, 2010.z

Google Scholar