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Key Engineering Materials Vols. 257-258

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.257-258

ToC:

Table of Contents

Paper Title Page

A New Process for Internal Polishing of Cemented Carbide Using a Vibrating Tool with Two-Dimensional Small Motions
Authors: C. Yamamoto, I. Nakada, T. Kuboi, Takeo Shinmura
417
Prediction of Material Removal in Polishing Free-Form Surfaces with Fixed Abrasives
Authors: L. Zhang
423
Improvement of Simulation Accuracy in Precision CMP with Oscillation Speed Control
Authors: Kenichiro Yoshitomi, Atsunobu Une, Masaaki Mochida
429
A 3D Numerical Study of the Polishing Behavior during an Oxide Chemical Mechanical Planarization Process
Authors: D.H. Lee, D.J. Kwon, Yi Koan Hong, Jin Goo Park
433
Fabrication of High-Quality Surfaces on Micro Tools by the ELID Grinding Technique
Authors: Kazutoshi Katahira, Hitoshi Ohmori, Yoshihiro Uehara, Y. Watanabe, Wei Min Lin, J. Komotori, M. Mizutani
441
Abrasive Micromachining with a Multi-Axes Vibration Tool
Authors: Nobuyuki Moronuki, Fusahito Yoshida, Y. Sato, A. Kaneko
447
A Study of the Micro Pole Structure Fabrication and Application Technology by Micro End-Milling Process
Authors: T. Je, J. Lee, Doo Sun Choi, E. Lee, B. Shin, K. Whang
453
A Study on the Micro Machining of Si Wafer Using Surface Chemical Reaction
Authors: J.M. Park, Hae Do Jeong
459
An Investigation on the 3D Micromachining Techniques Based on a SPM
Authors: Yong Da Yan, T. Sun, Shen Dong, Ying Chun Liang, K. Cheng
465
Improvement of Corrosion Resistance and Mechanical Properties of the Biomaterial Ti-6Al-4V Alloy by ELID Grinding
Authors: M. Mizutani, J. Komotori, Kazutoshi Katahira, Y. Watanabe, Hitoshi Ohmori
473

Showing 71 to 80 of 98 Paper Titles

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